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Title
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Addition of yttrium into films: microstructure and electrical properties
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Author
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Abstract
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| The cubic phase of HfO2 was stabilized by addition of yttrium in thin films grown on Si/SiO2 by metal-organic chemical vapor deposition. The cubic phase was obtained for contents of 6.5 at. % Y or higher at a temperature as low as 470 °C. The complete compositional range (from 1.5 to 99.5 at. % Y) was investigated. The crystalline structure of HfO2 was determined from x-ray diffraction, electron diffraction, and attenuated total-reflection infrared spectroscopy. For cubic films, the continuous increase in the lattice parameter indicates the formation of a solid-solution HfO2Y2O3. As shown by x-ray photoelectron spectroscopy, yttrium silicate is formed at the interface with silicon; the interfacial layer thickness increases with increasing yttrium content and increasing film thickness. The dependence of the intrinsic relative permittivity r as a function of Y content was determined. It exhibits a maximum of ~30 for ~8.8 at. % Y. The cubic phase is stable upon postdeposition high-temperature annealing at 900 °C under NH3. |
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Language
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English
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Source (journal)
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Journal of vacuum science and technology: A: vacuum surfaces and films. - New York, N.Y., 1983, currens
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Publication
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New York, N.Y.
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2009
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ISSN
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0734-2101
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DOI
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10.1116/1.3106627
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Volume/pages
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27
:3
(2009)
, p. 503-514
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ISI
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000265739100016
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Full text (Publisher's DOI)
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