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Title
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Study of the nucleation and growth of and ZnO thin films by means of molecular dynamics simulations
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Author
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Abstract
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| The nucleation and growth of titanium dioxide (TiO2) and zinc oxide (ZnO) thin films on Fe2O3 (hematite), Al2O3 (á-alumina) and SiO2 (á-quartz) are studied by molecular dynamics simulations. The results show the formation of a strong interface region between the substrate and the film in the six systems studied here. A combination of polycrystalline and amorphous phases are observed in the TiO2 films grown on the three substrates. ZnO deposition on the Fe2O3 and Al2O3 crystals yields a monocrystalline film growth. The ZnO film deposited on the SiO2 crystal exhibits less crystallinity. The simulation results are compared with experimental results available in the literature. |
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Language
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English
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Source (journal)
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Journal of crystal growth. - Amsterdam
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Publication
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Amsterdam
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2009
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ISSN
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0022-0248
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DOI
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10.1016/J.JCRYSGRO.2009.06.034
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Volume/pages
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311
:16
(2009)
, p. 4034-4043
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ISI
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000269580100012
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Full text (Publisher's DOI)
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