Publication
Title
TEM sample preparation by FIB for carbon nanotube interconnects
Author
Abstract
Language
English
Source (journal)
Ultramicroscopy. - Amsterdam
Publication
Amsterdam : 2009
ISSN
0304-3991
Volume/pages
109:11(2009), p. 1353-1359
ISI
000270765800006
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 09.11.2009
Last edited 06.07.2018
To cite this reference