Title |
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TEM sample preparation by FIB for carbon nanotube interconnects
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Author |
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Abstract |
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Language |
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English
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Source (journal) |
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Ultramicroscopy. - Amsterdam | |
Publication |
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Amsterdam : 2009
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ISSN |
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0304-3991
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Volume/pages |
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109:11(2009), p. 1353-1359
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ISI |
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000270765800006
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Full text (Publisher's DOI) |
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