| Title |
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TEM sample preparation by FIB for carbon nanotube interconnects
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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Ultramicroscopy. - Amsterdam | |
| Publication |
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Amsterdam : 2009
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| ISSN |
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0304-3991
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| Volume/pages |
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109:11(2009), p. 1353-1359
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| ISI |
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000270765800006
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| Full text (Publisher's DOI) |
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