Title
Numerical simulation of hydrocarbon plasmas for nanoparticle formation and the growth of nanostructured thin films Numerical simulation of hydrocarbon plasmas for nanoparticle formation and the growth of nanostructured thin films
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Oxford ,
Subject
Physics
Chemistry
Source (journal)
Plasma physics and controlled fusion. - Oxford, 1984, currens
Volume/pages
51(2009) , p. 124034,1-124034,8
ISSN
0741-3335
ISI
000271940800045
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
This paper outlines two different numerical simulation approaches, carried out by our group, used for describing hydrocarbon plasmas in their applications for either nanoparticle formation in the plasma or the growth of nanostructured thin films, such as nanocrystalline diamond (NCD). A plasma model based on the fluid approach is utilized to study the initial mechanisms giving rise to nanoparticle formation in an acetylene plasma. The growth of NCD is investigated by molecular dynamics simulations, describing the interaction of the hydrocarbon species with a substrate.
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