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Title
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Influence of Al content on the properties of MgO grown by reactive magnetron sputtering
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Author
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Abstract
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| In the present work, reactive magnetron sputtering in DC mode was used to grow complex oxide thin films, starting from two separate pure metal targets. A series of coatings was produced with a stoichiometry of the film ranging from MgO, over MgxAlyOz to Al2O3. The surface energy, crystallinity, hardness, refractive index, and surface roughness were investigated. A relationship between all properties studied and the Mg content of the samples was found. A critical compositional region for the Mg-Al-O system where all properties exhibit a change was noticed. |
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Language
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English
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Source (journal)
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Plasma processes and polymers. - Weinheim
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Publication
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Weinheim
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2009
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ISSN
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1612-8850
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Volume/pages
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6
:S:1
(2009)
, p. S751-S754
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ISI
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000272302900144
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Full text (Publisher's DOI)
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