Publication
Title
Particle-in-cell/Monte Carlo collisions model for the reactive sputter deposition of nitride layers
Author
Abstract
Language
English
Source (journal)
Plasma processes and polymers. - Weinheim
Publication
Weinheim : 2009
ISSN
1612-8850
Volume/pages
6:S:1(2009), p. S784-S788
ISI
000272302900149
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Project info
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.12.2009
Last edited 18.05.2018
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