Publication
Title
3D processing on 6 in. high resistive SOI wafers: fabrication of edgeless strip and pixel detectors
Author
Abstract
Language
English
Source (journal)
Nuclear instruments and methods in physics research: A: accelerators, spectrometers, detectors and associated equipment
Publication
2009
Volume/pages
607:1(2009), p. 85-88
ISI
000268987900025
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 15.03.2010
Last edited 14.02.2018
To cite this reference