Title
Modeling of the magnetron discharge Modeling of the magnetron discharge
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
bookPart
Publication
Berlin :Springer, [*]
Subject
Chemistry
Source (book)
Reactive sputter deposition / Depla, Diederik. - Berlin, Heidelberg, 2008
Source (series)
Springer series in materials science. - Berlin; 109
ISBN
978-3-540-76664-3
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Handle