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Title
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Modeling of the magnetron discharge
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Author
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Language
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English
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Source (book)
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Reactive sputter deposition / Depla, Diederik. - Berlin, Heidelberg, 2008
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Source (series)
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Springer series in materials science. - Berlin; 109
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Publication
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Berlin
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Springer
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2008
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ISBN
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978-3-540-76664-3
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Volume/pages
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p. 61-130
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