Publication
Title
Modeling of the magnetron discharge
Author
Language
English
Source (book)
Reactive sputter deposition / Depla, Diederik. - Berlin, Heidelberg, 2008
Source (series)
Springer series in materials science. - Berlin; 109
Publication
Berlin : Springer, 2008
ISBN
978-3-540-76664-3
Volume/pages
p. 61-130
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 12.05.2010
Last edited 10.07.2013
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