Publication
Title
An extended RF methane plasma 1D fluid model of interest in deposition of diamond-like carbon layers
Author
Language
English
Source (book)
Proceedings of 7th International Symposium on Trends and Applications of Thin Films
Publication
S.l. : Société française du vide, 2000
Volume/pages
p. 399-401
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 20.05.2010
Last edited 12.09.2013
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