Title
An extended RF methane plasma 1D fluid model of interest in deposition of diamond-like carbon layers An extended RF methane plasma 1D fluid model of interest in deposition of diamond-like carbon layers
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
conferenceObject
Publication
S.l. :Société française du vide, [*]
Subject
Chemistry
Source (book)
Proceedings of 7th International Symposium on Trends and Applications of Thin Films
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Handle