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Title
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An extended RF methane plasma 1D fluid model of interest in deposition of diamond-like carbon layers
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Author
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Language
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English
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Source (book)
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Proceedings of 7th International Symposium on Trends and Applications of Thin Films
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Publication
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S.l.
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Société française du vide
,
2000
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Volume/pages
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p. 399-401
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