|
Title
|
|
|
|
Modelling of formation and transport of nanoparticles in silane discharges
| |
|
Author
|
|
|
|
| |
|
Language
|
|
|
|
English
| |
|
Source (book)
|
|
|
|
Proceedings of the 31st European Physical Society Conference on Plasma Physics / Hutchinson, H. [edit.]
| |
|
Publication
|
|
|
|
S.l.
:
ECA
,
2004
| |
|
Volume/pages
|
|
|
|
p. 0-1.10
| |
|