Publication
Title
Computer simulations of an oxygen inductively coupled plasma used for plasma-assisted atomic layer deposition
Author
Abstract
Language
English
Source (journal)
Plasma sources science and technology / Institute of Physics [Londen] - Bristol, 1992, currens
Publication
Bristol : Institute of Physics, 2011
ISSN
0963-0252
Volume/pages
20:1(2011), p. 015008,1-015008,10
Article Reference
015008
ISI
000286592200009
Medium
E-only publicatie
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Project info
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 10.01.2011
Last edited 04.04.2018
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