Publication
Title
Plasma chemistry modeling for an inductively coupled plasma used for the growth of carbon nanotubes
Author
Abstract
A hybrid model, called the hybrid plasma equipment model (HPEM), is used to describe the plasma chemistry in an inductively coupled plasma, operating in a gas mixture of C2H2 with either H2 or NH3, as typically used for carbon nanotube (CNT) growth. Two-dimensional profiles of power density, electron temperature and density, gas temperature, and densities of some plasma species are plotted and analyzed. Besides, the fluxes of the various plasma species towards the substrate (where the CNTs can be grown), as well as the decomposition rates of the feedstock gases (C2H2, NH3 and H2), are calculated as a function of the C2H2 fraction in both gas mixtures.
Language
English
Source (journal)
Journal of physics : conference series. - Bristol
Publication
Bristol : 2011
ISSN
1742-6588 [print]
1742-6596 [online]
Volume/pages
275:1(2011), p. 012021,1-012021,9
Full text (Publisher's DOI)
Full text (open access)
UAntwerpen
Faculty/Department
Research group
[E?say:metaLocaldata.cgzprojectinf]
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 10.02.2011
Last edited 15.01.2015
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