Publication
Title
Behavior of electrons in a dual-magnetron sputter deposition system : a Monte Carlo model
Author
Abstract
Language
English
Source (journal)
New journal of physics / Institute of Physics [Londen]; German Physical Society. - Bristol
Publication
Bristol : 2011
ISSN
1367-2630
Volume/pages
13(2011), p. 033018,1-033018,17
Article Reference
033018
ISI
000289064600001
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (open access)
UAntwerpen
Faculty/Department
Research group
Project info
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 25.03.2011
Last edited 30.07.2018
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