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Title
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Elucidating the asymmetric behavior of the discharge in a dual magnetron sputter deposition system
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Author
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Abstract
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| A magnetron discharge is characterized by drifts of the charged particles guiding center, caused by the magnetic field, in contrast to unmagnetized discharges. Because of these drifts, a pronounced asymmetry of the discharge can be observed in a dual magnetron setup. In this work, it is found that the shape of the discharge in a dual magnetron configuration depends on the magnetic field configuration. In a closed configuration, strong drifts were observed in one preferential direction, whereas in a mirror configuration the deflection of the discharge was not so pronounced. Our calculations confirm experimental observations. |
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Language
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English
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Source (journal)
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Applied physics letters / American Institute of Physics. - New York, N.Y., 1962, currens
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Publication
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New York, N.Y.
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American Institute of Physics
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2011
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ISSN
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0003-6951
[print]
1077-3118
[online]
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DOI
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10.1063/1.3574365
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Volume/pages
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98
:13
(2011)
, p. 131502,1-131502,3
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Article Reference
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131502
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ISI
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000289153600017
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Medium
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E-only publicatie
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Full text (Publisher's DOI)
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