Title
Fluid simulations of frequency effects on nonlinear harmonics in inductively coupled plasma
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Woodbury, N.Y. ,
Subject
Physics
Chemistry
Source (journal)
Physics of plasmas. - Woodbury, N.Y.
Volume/pages
18(2011) :3 , p. 033504,1-033504,9
ISSN
1070-664X
Article Reference
033504
ISI
000289151900073
Carrier
E-only publicatie
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
A fluid model is self-consistently established to investigate the harmonic effects in an inductively coupled plasma, where the electromagnetic field is solved by the finite difference time domain technique. The spatiotemporal distribution of harmonic current density, harmonic potential, and other plasma quantities, such as radio frequency power deposition, plasma density, and electron temperature, have been investigated. Distinct differences in current density have been observed when calculated with and without Lorentz force, which indicates that the nonlinear Lorentz force plays an important role in the harmonic effects, especially at low frequencies. Moreover, the even harmonics are larger than the odd harmonics both in the current density and the potential. Finally, the dependence of various plasma quantities with and without the Lorentz force on various driving frequencies is also examined. It is shown that the deposited power density decreases and the depth of penetration increases slightly because of the Lorentz force. The electron density increases distinctly while the electron temperature remains almost the same when the Lorentz force is taken into account.
E-info
https://repository.uantwerpen.be/docman/iruaauth/fdf375/8c4397cd076.pdf
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