Title
The influence of Cr and Y on the micro structural evolution of Mg―Cr―O and Mg―Y―O thin films The influence of Cr and Y on the micro structural evolution of Mg―Cr―O and Mg―Y―O thin films
Author
Faculty/Department
Faculty of Sciences. Chemistry
Faculty of Sciences. Physics
Publication type
article
Publication
Lausanne ,
Subject
Physics
Chemistry
Source (journal)
Thin solid films: an international journal on the science and technology of thin and thick films. - Lausanne
Volume/pages
519(2011) :16 , p. 5388-5396
ISSN
0040-6090
ISI
000292573500013
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
The compositional influence of Cr and Y on the microstructure of Mg&#8213;Cr&#8213;O, and Mg&#8213;Y&#8213;O films synthesized by reactive magnetron sputtering has been investigated by transmission electron microscopy, X-ray diffraction and molecular dynamics simulations. A decrease in crystallinity is observed in these films as the M (Cr or Y) content is increased. It is found that M forms a solid solution with MgO for metal ratios up to ~ 70% and ~ 50% for Cr and Y respectively. Above ~ 70% Cr metal ratio the Mg&#8213;Cr&#8213;O films are found to be completely amorphous. The Mg&#8213;Y&#8213;O films are composed of Mg(Y)O and Y2O3 nano crystallites, up to ~ 50% Y metal ratio. Above this ratio, only Y2O3 nano crystallites are found. The preferential < 111> MgO grain alignment is strongly affected by the increase in M content. For M metal ratios up to ~ 50%, there is a selective promotion of the < 100> MgO grain alignments and a decline in the < 111> grain alignments.
E-info
https://repository.uantwerpen.be/docman/iruaauth/41a539/3ad990950e4.pdf
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