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Title
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The influence of Cr and Y on the micro structural evolution of Mg―Cr―O and Mg―Y―O thin films
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Author
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Abstract
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| The compositional influence of Cr and Y on the microstructure of Mg―Cr―O, and Mg―Y―O films synthesized by reactive magnetron sputtering has been investigated by transmission electron microscopy, X-ray diffraction and molecular dynamics simulations. A decrease in crystallinity is observed in these films as the M (Cr or Y) content is increased. It is found that M forms a solid solution with MgO for metal ratios up to ~ 70% and ~ 50% for Cr and Y respectively. Above ~ 70% Cr metal ratio the Mg―Cr―O films are found to be completely amorphous. The Mg―Y―O films are composed of Mg(Y)O and Y2O3 nano crystallites, up to ~ 50% Y metal ratio. Above this ratio, only Y2O3 nano crystallites are found. The preferential < 111> MgO grain alignment is strongly affected by the increase in M content. For M metal ratios up to ~ 50%, there is a selective promotion of the < 100> MgO grain alignments and a decline in the < 111> grain alignments. |
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Language
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English
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Source (journal)
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Thin solid films : an international journal on the science and technology of thin and thick films. - Lausanne, 1967, currens
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Publication
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Lausanne
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2011
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ISSN
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0040-6090
[print]
1879-2731
[online]
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DOI
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10.1016/J.TSF.2011.02.050
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Volume/pages
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519
:16
(2011)
, p. 5388-5396
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ISI
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000292573500013
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Full text (Publisher's DOI)
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Full text (publisher's version - intranet only)
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