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Title
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Characterization of an magnetron plasma by a multi-species Monte Carlo model
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Author
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Abstract
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| A combined Monte Carlo (MC)/analytical surface model is developed to study the plasma processes occurring during the reactive sputter deposition of TiOx thin films. This model describes the important plasma species with a MC approach (i.e. electrons, Ar+ ions, {\rm O}_2 |
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Language
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English
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Source (journal)
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Plasma sources science and technology / Institute of Physics [Londen] - Bristol, 1992, currens
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Publication
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Bristol
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Institute of Physics
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2011
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ISSN
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0963-0252
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DOI
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10.1088/0963-0252/20/4/045013
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Volume/pages
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20
:4
(2011)
, p. 045013,1-045013,12
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Article Reference
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045013
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ISI
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000295829800015
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Medium
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E-only publicatie
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Full text (Publisher's DOI)
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Full text (publisher's version - intranet only)
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