Publication
Title
Characterization of an magnetron plasma by a multi-species Monte Carlo model
Author
Abstract
A combined Monte Carlo (MC)/analytical surface model is developed to study the plasma processes occurring during the reactive sputter deposition of TiOx thin films. This model describes the important plasma species with a MC approach (i.e. electrons, Ar+ ions, {\rm O}_2
Language
English
Source (journal)
Plasma sources science and technology / Institute of Physics. - Bristol, 1992, currens
Publication
Bristol : Institute of Physics, 2011
ISSN
0963-0252
Volume/pages
20:4(2011), p. 045013,1-045013,12
Article Reference
045013
ISI
000295829800015
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
[E?say:metaLocaldata.cgzprojectinf]
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 23.06.2011
Last edited 20.08.2017
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