Title
Characterization of an <tex>$Ar/O_{2}$</tex> magnetron plasma by a multi-species Monte Carlo model Characterization of an <tex>$Ar/O_{2}$</tex> magnetron plasma by a multi-species Monte Carlo model
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Bristol :Institute of Physics ,
Subject
Chemistry
Source (journal)
Plasma sources science and technology / Institute of Physics. - Bristol, 1992, currens
Volume/pages
20(2011) :4 , p. 045013,1-045013,12
ISSN
0963-0252
Article Reference
045013
Carrier
E-only publicatie
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
A combined Monte Carlo (MC)/analytical surface model is developed to study the plasma processes occurring during the reactive sputter deposition of TiOx thin films. This model describes the important plasma species with a MC approach (i.e. electrons, Ar+ ions, {\rm O}_2
E-info
https://repository.uantwerpen.be/docman/iruaauth/b201b0/2211ddf2486.pdf
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