Publication
Title
Simultaneous etching and deposition processes during the etching of silicon with a inductively coupled plasma
Author
Abstract
Language
English
Source (journal)
Plasma processes and polymers. - Weinheim
Publication
Weinheim : 2011
ISSN
1612-8850
Volume/pages
8:6(2011), p. 490-499
ISI
000292116800003
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Project info
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 31.08.2011
Last edited 14.05.2018
To cite this reference