Publication
Title
Numerical simulations of inductively coupled plasmas for applications in the microelectronics industry
Author
Tinck, Stefan
Language
English
Publication
Antwerpen
:
Universiteit Antwerpen, Faculteit Wetenschappen, Departement Chemie
,
2011
Volume/pages
280 p. : ill.
UAntwerpen
Faculty/Department
Faculty of Sciences. Chemistry
Research group
Plasma Lab for Applications in Sustainability and Medicine - Antwerp (PLASMANT)
Publication type
Doctoral thesis
Subject
Chemistry
Affiliation
Publications with a UAntwerp address
External links
Record
Identifier
Creation
04.11.2011
Last edited
07.10.2022
To cite this reference
https://hdl.handle.net/10067/920510151162165141