Publication
Title
Numerical simulations of inductively coupled plasmas for applications in the microelectronics industry
Author
Language
English
Publication
Antwerpen : Universiteit Antwerpen, Faculteit Wetenschappen, Departement Chemie , 2011
Volume/pages
280 p. : ill.
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 04.11.2011
Last edited 15.07.2021
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