Title
Numerical simulations of inductively coupled plasmas for applications in the microelectronics industryNumerical simulations of inductively coupled plasmas for applications in the microelectronics industry
Author
Faculty/Department
Faculty of Sciences. Chemistry
Research group
Plasma, laser ablation and surface modeling - Antwerp (PLASMANT)
Publication type
doctoralThesis
Publication
Antwerpen :Universiteit Antwerpen, Faculteit Wetenschappen, Departement Chemie, [*]
Subject
Chemistry
Volume/pages
280 p., ill.
1
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Handle