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Title
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Analysis of a quadratic algorithm for the angular-resolved XPS method for depth profiling
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Author
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Abstract
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| Several models for angular-resolved (AR) XPS are known that are based on the 'box-car' function method [J. Electron Spectrosc. Relat. Phenom. 43 (1987) 61; Nucl. Instrum. Meth. B 166-167 (2000) 350]. In this paper, we analyze the problems arising when solving the 'inverse' problem - obtaining the depth profile from angular-dependent XPS data. We also describe some characteristics of the newly developed quadratic algorithm and present comparisons of tests performed with several known functions, such as quadratic formulae of Laguerre, Gauss, etc. The accuracy of the method is estimated and is tested on the example of two idealized concentration depth profiles, The algorithm is tested and applied to the angular-dependent XPS data on the example of AR-XPS depth profiles of yttria-stabilized ZrO2 crystals obtained by 10 keV He+ ion bombardment. (C) 2002 Elsevier Science B.V. All rights reserved. |
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Language
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English
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Source (journal)
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Journal of electron spectroscopy and related phenomena. - Amsterdam
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Publication
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Amsterdam
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2002
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ISSN
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0368-2048
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DOI
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10.1016/S0368-2048(01)00348-6
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Volume/pages
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122
:2
(2002)
, p. 115-122
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ISI
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000173547600002
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Full text (Publisher's DOI)
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Full text (publisher's version - intranet only)
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