Title
Analysis of a quadratic algorithm for the angular-resolved XPS method for depth profilingAnalysis of a quadratic algorithm for the angular-resolved XPS method for depth profiling
Author
Faculty/Department
Faculty of Sciences. Chemistry
Research group
Department of Chemistry
Publication type
article
Publication
Amsterdam,
Subject
Chemistry
Source (journal)
Journal of electron spectroscopy and related phenomena. - Amsterdam
Volume/pages
122(2002):2, p. 115-122
ISSN
0368-2048
ISI
000173547600002
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Abstract
Several models for angular-resolved (AR) XPS are known that are based on the 'box-car' function method [J. Electron Spectrosc. Relat. Phenom. 43 (1987) 61; Nucl. Instrum. Meth. B 166-167 (2000) 350]. In this paper, we analyze the problems arising when solving the 'inverse' problem - obtaining the depth profile from angular-dependent XPS data. We also describe some characteristics of the newly developed quadratic algorithm and present comparisons of tests performed with several known functions, such as quadratic formulae of Laguerre, Gauss, etc. The accuracy of the method is estimated and is tested on the example of two idealized concentration depth profiles, The algorithm is tested and applied to the angular-dependent XPS data on the example of AR-XPS depth profiles of yttria-stabilized ZrO2 crystals obtained by 10 keV He+ ion bombardment. (C) 2002 Elsevier Science B.V. All rights reserved.
E-info
https://repository.uantwerpen.be/docman/iruaauth/d75283/87f2084.pdf
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