Publication
Title
Chemical and structural characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy and transmission electron microscopy
Author
Abstract
Language
English
Source (book)
Proceedings of the 7th International Symposium on High Purity Silicon held at the 202nd Meeting of the Electrochemical Society, October 20-25, 2002, Salt Lake City, Utah
Publication
S.l. : 2002
ISBN
1-56677-344-X
Volume/pages
p. 183-194
ISI
000186760500016
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 24.02.2012
Last edited 11.08.2018
To cite this reference