Title
Present state of the composition evaluation of ternary semiconductor nanostructures by lattice fringe analysis
Author
Faculty/Department
Faculty of Sciences. Physics
Publication type
article
Publication
Subject
Physics
Source (journal)
CONFERENCE SERIES- INSTITUTE OF PHYSICS
Volume/pages
(2003) :180 , p. 19-22
ISBN
0-7503-0979-2
ISI
000222976100004
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Abstract
Semiconductor heterostructures are used for the fabrication of optoelectronic devices. Performance of such devices is governed by their chemical morphology. The composition distribution of quantum wells and dots is influenced by kinetic growth processes which are not understood completely at present. To obtain more information about these effects, methods for composition determination with a spatial resolution at a near atomic scale are necessary. In this paper we focus on the present state of the composition evaluation by the lattice fringe analysis (CELFA) technique and explain the basic ideas, optimum imaging conditions, precision and accuracy.
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