Publication
Title
Present state of the composition evaluation of ternary semiconductor nanostructures by lattice fringe analysis
Author
Abstract
Semiconductor heterostructures are used for the fabrication of optoelectronic devices. Performance of such devices is governed by their chemical morphology. The composition distribution of quantum wells and dots is influenced by kinetic growth processes which are not understood completely at present. To obtain more information about these effects, methods for composition determination with a spatial resolution at a near atomic scale are necessary. In this paper we focus on the present state of the composition evaluation by the lattice fringe analysis (CELFA) technique and explain the basic ideas, optimum imaging conditions, precision and accuracy.
Language
English
Source (journal)
CONFERENCE SERIES- INSTITUTE OF PHYSICS
Publication
2003
ISBN
0-7503-0979-2
Volume/pages
180(2003), p. 19-22
ISI
000222976100004
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 29.02.2012
Last edited 07.11.2017
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