Publication
Title
Characterisation of the local stress induced by shallow trench isolation and CoSi2 silicidation
Author
Abstract
Language
English
Source (journal)
CONFERENCE SERIES- INSTITUTE OF PHYSICS
Publication
2001
ISBN
0-7503-0818-4
Volume/pages
169(2001), p. 481-484
ISI
000176465200103
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 29.02.2012
Last edited 18.07.2018
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