Title
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Mathematical-modeling of secondary-ion energy-spectra
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Author
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Abstract
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An attempt has been made to compose a mathematical model of secondary ion energy spectra, taking into account the sputter process, the ionization process and the transmission of the secondary ion mass spectrometer. In this model a new equation for the transmission of the instrument was formulated. The percentage fit of the model was equal to 99.9+% for 80% of the tested cases and 99+% for all measured energy distributions. A total of 59 energy distributions were tested. It was hoped that the various mathematical parameters used in the expressions to describe the above processes and characteristics will provide a direct link with the variation of the measured isotopic ratios and hence a better insight into the reasons for this variation. Unfortunately, this objective was not achieved since the uncertainty of the calculated ratio by model-fitting the energy distributions is larger than the measured uncertainty. However, the model provides some insight into the energy dependent fractionation observed within individual measurements. |
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Language
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English
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Source (journal)
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International journal of mass spectrometry and ion processes. - Amsterdam, 1983 - 1998
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Publication
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Amsterdam
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1993
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ISSN
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0168-1176
[print]
1873-2801
[online]
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DOI
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10.1016/0168-1176(93)87066-2
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Volume/pages
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128
:3
(1993)
, p. 173-179
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ISI
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A1993MF78600007
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Full text (Publisher's DOI)
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