Publication
Title
Molecular dynamics simulation of temperature effects on CF(3)(+) etching of Si surface
Author
Abstract
Language
English
Source (journal)
Wuli xuebao
Publication
2010
ISSN
1000-3290
Volume/pages
59:10(2010), p. 7225-7231
ISI
000283406400078
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 01.03.2012
Last edited 24.09.2018
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