|
Title
|
|
|
|
The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes
| |
|
Author
|
|
|
|
| |
|
Abstract
|
|
|
|
| This paper reports on a novel micromachining technique for fabricating rubber membranes with an area of tens of square centimetres and a thickness of a few micrometers. In the basic technique a silicon wafer is spincoated with liquid rubber, bonded to a second (sacrificial) wafer and locally thinned out by anisotropical wet etching. The potential of the technique is highlighted in a demonstration example where a 20cm(2) large biocompatible membrane is used to mechanically support and thermally isolate a large active area thermopile in a microcalorimeter for medical use. |
| |
|
Language
|
|
|
|
English
| |
|
Source (book)
|
|
|
|
1997 International Conference on Solid-State Sensors and Actuators, June 16-19, 1997, Chicago, Ill.
| |
|
Publication
|
|
|
|
New York, N.Y.
:
IEEE
,
1997
| |
|
ISBN
|
|
|
|
0-7803-3829-4
| |
|
Volume/pages
|
|
|
|
p. 1423-1426
| |
|
ISI
|
|
|
|
A1997BJ35B00351
| |
|