Title
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The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes
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Author
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Abstract
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This paper reports on a novel micromachining technique for fabricating rubber membranes with an area of tens of square centimetres and a thickness of a few micrometers. In the basic technique a silicon wafer is spincoated with liquid rubber, bonded to a second (sacrificial) wafer and locally thinned out by anisotropical wet etching. The potential of the technique is highlighted in a demonstration example where a 20cm(2) large biocompatible membrane is used to mechanically support and thermally isolate a large active area thermopile in a microcalorimeter for medical use. |
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Language
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English
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Source (book)
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1997 International Conference on Solid-State Sensors and Actuators, June 16-19, 1997, Chicago, Ill.
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Publication
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New York, N.Y.
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IEEE
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1997
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ISBN
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0-7803-3829-4
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Volume/pages
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p. 1423-1426
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ISI
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A1997BJ35B00351
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