Title
The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes
Author
Faculty/Department
Faculty of Sciences. Biology
Publication type
conferenceObject
Publication
New York, N.Y. :IEEE, [*]
Subject
Engineering sciences. Technology
Source (book)
1997 International Conference on Solid-State Sensors and Actuators, June 16-19, 1997, Chicago, Ill.
ISBN
0-7803-3829-4
ISI
A1997BJ35B00351
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Abstract
This paper reports on a novel micromachining technique for fabricating rubber membranes with an area of tens of square centimetres and a thickness of a few micrometers. In the basic technique a silicon wafer is spincoated with liquid rubber, bonded to a second (sacrificial) wafer and locally thinned out by anisotropical wet etching. The potential of the technique is highlighted in a demonstration example where a 20cm(2) large biocompatible membrane is used to mechanically support and thermally isolate a large active area thermopile in a microcalorimeter for medical use.
E-info
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:A1997BJ35B00351&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=ef845e08c439e550330acc77c7d2d848
Handle