Title
The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes
Author
Faculty/Department
Faculty of Sciences. Biology
Publication type
conferenceObject
Publication
New York, N.Y. :IEEE, [*]
Subject
Engineering sciences. Technology
Source (book)
1997 International Conference on Solid-State Sensors and Actuators, June 16-19, 1997, Chicago, Ill.
ISBN
0-7803-3829-4
ISI
A1997BJ35B00351
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Abstract
This paper reports on a novel micromachining technique for fabricating rubber membranes with an area of tens of square centimetres and a thickness of a few micrometers. In the basic technique a silicon wafer is spincoated with liquid rubber, bonded to a second (sacrificial) wafer and locally thinned out by anisotropical wet etching. The potential of the technique is highlighted in a demonstration example where a 20cm(2) large biocompatible membrane is used to mechanically support and thermally isolate a large active area thermopile in a microcalorimeter for medical use.
E-info
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:A1997BJ35B00351&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=ef845e08c439e550330acc77c7d2d848
Handle