The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes
Faculty of Sciences. Biology
New York, N.Y. :IEEE, 1997
Engineering sciences. Technology
1997 International Conference on Solid-State Sensors and Actuators, June 16-19, 1997, Chicago, Ill.
University of Antwerp
This paper reports on a novel micromachining technique for fabricating rubber membranes with an area of tens of square centimetres and a thickness of a few micrometers. In the basic technique a silicon wafer is spincoated with liquid rubber, bonded to a second (sacrificial) wafer and locally thinned out by anisotropical wet etching. The potential of the technique is highlighted in a demonstration example where a 20cm(2) large biocompatible membrane is used to mechanically support and thermally isolate a large active area thermopile in a microcalorimeter for medical use.