Publication
Title
The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes
Author
Abstract
This paper reports on a novel micromachining technique for fabricating rubber membranes with an area of tens of square centimetres and a thickness of a few micrometers. In the basic technique a silicon wafer is spincoated with liquid rubber, bonded to a second (sacrificial) wafer and locally thinned out by anisotropical wet etching. The potential of the technique is highlighted in a demonstration example where a 20cm(2) large biocompatible membrane is used to mechanically support and thermally isolate a large active area thermopile in a microcalorimeter for medical use.
Language
English
Source (book)
1997 International Conference on Solid-State Sensors and Actuators, June 16-19, 1997, Chicago, Ill.
Publication
New York, N.Y. : IEEE, 1997
ISBN
0-7803-3829-4
Volume/pages
p. 1423-1426
ISI
A1997BJ35B00351
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 01.03.2012
Last edited 20.07.2017
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