The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranesThe use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes
Faculty of Sciences. Biology
Department of Biology
New York, N.Y. :IEEE, 1997[*]1997
Engineering sciences. Technology
1997 International Conference on Solid-State Sensors and Actuators, June 16-19, 1997, Chicago, Ill.
University of Antwerp
This paper reports on a novel micromachining technique for fabricating rubber membranes with an area of tens of square centimetres and a thickness of a few micrometers. In the basic technique a silicon wafer is spincoated with liquid rubber, bonded to a second (sacrificial) wafer and locally thinned out by anisotropical wet etching. The potential of the technique is highlighted in a demonstration example where a 20cm(2) large biocompatible membrane is used to mechanically support and thermally isolate a large active area thermopile in a microcalorimeter for medical use.