Publication
Title
Electron microscopy and Rutherford backscattering spectrometry characterisation of 6H SiC samples implanted with
Author
Abstract
Language
English
Source (journal)
Nuclear instruments and methods in physics research: B: beam interactions with materials and atoms. - Amsterdam
Source (book)
Symposium 1 on New Trends in Ion Beam Processing of Materials, at the, E-MRS 96 Spring Meeting, June 04-07, 1996, Strasbourg, France
Publication
Amsterdam : Elsevier, 1996
ISSN
0168-583X
Volume/pages
120:1-4(1996), p. 186-189
ISI
A1996VZ24500040
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
External links
Web of Science
Record
Identification
Creation 01.03.2012
Last edited 30.06.2018