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Title
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The evolution of HVEM application in antwerp
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Author
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Abstract
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| The evolution of the use of the 1250 keV high-voltage electron microscope in Antwerp is sketched by illustrating a non-exhaustive set of examples in various fields. One of the main present fields of application gets some more attention, i.e. the defect studies as produced by processing steps in microelectronic devices: (i) strain-induced dislocations at the edges of various device isolation interlayers, (ii) morphologies resulting from high-energy ion implantation creating buried layers for silicon on insulator (SOI) and other implantation technologies. |
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Language
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English
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Source (journal)
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Ultramicroscopy. - Amsterdam
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Source (book)
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2nd Osaka International Symp.on High-Voltage Electron Microscopy : New Directions and Future Aspects of High Voltage Electron Microscopy, November 8-10, 1990, Osaka University, Osaka, Japan
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Publication
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Amsterdam
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Elsevier
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1991
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ISSN
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0304-3991
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DOI
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10.1016/0304-3991(91)90208-N
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Volume/pages
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39
:1-4
(1991)
, p. 287-298
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ISI
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A1991GY23100034
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Full text (Publisher's DOI)
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