Publication
Title
PECVD growth of carbon nanotubes : from experiment to simulation
Author
Abstract
Nanostructured carbon materials show a tremendous variety in atomic structure, morphology, properties, and applications. As all properties are ultimately determined by the structure of the material, a thorough understanding of the growth mechanisms that give rise to the particular structure is critical. On many occasions, it has been shown that plasma enhanced growth can be strongly beneficial. This review will describe the authors current understanding of plasma enhanced growth of carbon nanotubes, the prototypical example of nanostructured carbon materials, as obtained from experiments, simulations, and modeling. Specific emphasis is put on where experiments and computational approaches correspond, and where they differ. Also, the current status on simulating PECVD growth of some other carbon nanomaterials is reviewed, including amorphous carbon, graphene, and metallofullerenes. Finally, computational challenges with respect to the simulation of PECVD growth are identified.
Language
English
Source (journal)
Journal of vacuum science and technology: B: micro-electronics processing and phenomena. - New York, N.Y.
Publication
New York, N.Y. : 2012
ISSN
0734-211X
Volume/pages
30:3(2012), p. 030803,1-030803,17
Article Reference
030803
ISI
000305042000010
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 17.04.2012
Last edited 23.09.2017
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