Publication
Title
PECVD growth of carbon nanotubes : from experiment to simulation
Author
Abstract
Language
English
Source (journal)
Journal of vacuum science and technology: B: micro-electronics processing and phenomena. - New York, N.Y.
Publication
New York, N.Y. : 2012
ISSN
0734-211X
Volume/pages
30:3(2012), p. 030803,1-030803,17
Article Reference
030803
ISI
000305042000010
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 17.04.2012
Last edited 30.09.2018
To cite this reference