Title
|
|
|
|
Preparation of amorphous chalcogenide films by plasma-enhanced chemical vapour deposition
| |
Author
|
|
|
|
| |
Language
|
|
|
|
English
| |
Source (book)
|
|
|
|
Electronic, optoelectronic and magnetic thin films / Marshall, J.M. [edit.]
| |
Publication
|
|
|
|
s.l.
:
Research Studies Press
,
1994
| |
Volume/pages
|
|
|
|
p. 262-269
| |
|