Publication
Title
Modeling inductively coupled plasmas used for filling of microtrenches in shallow trench isolation (STI)
Author
Abstract
Language
English
Source (journal)
Plasma processes and polymers. - Weinheim
Publication
Weinheim : 2012
ISSN
1612-8850
Volume/pages
9:5(2012), p. 522-539
ISI
000303858100010
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Project info
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 12.07.2012
Last edited 28.06.2018
To cite this reference