Publication
Title
Transmission electron microscopy study of silicon nitride amorphous films obtained by reactive pulsed laser deposition
Author
Abstract
Language
English
Source (journal)
Thin solid films: an international journal on the science and technology of thin and thick films. - Lausanne
Publication
Lausanne : 2001
ISSN
0040-6090
Volume/pages
397:1-2(2001), p. 12-16
ISI
000171839300004
Full text (Publisher's DOI)
UAntwerpen
Publication type
Subject
External links
Web of Science
Record
Identification
Creation 12.07.2012
Last edited 16.05.2018