Publication
Title
Comparison of dynamic simulations with RBS measurements of low energy ion implantation of into substrates
Author
Abstract
Language
English
Source (journal)
Microchimica acta. - Wien, 1966, currens
Publication
Wien : Springer, 2004
ISSN
0026-3672 [print]
1436-5073 [online]
Volume/pages
145(2004), p. 67-74
ISI
000221453500012
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 19.07.2012
Last edited 24.02.2021
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