Publication
Title
Comparison of dynamic simulations with RBS measurements of low energy ion implantation of into substrates
Author
Abstract
Language
English
Source (journal)
Microchimica acta
Publication
2004
Volume/pages
145(2004), p. 67-74
ISI
000221453500012
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 19.07.2012
Last edited 03.09.2018
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